JPS6193670U - - Google Patents
Info
- Publication number
- JPS6193670U JPS6193670U JP17874384U JP17874384U JPS6193670U JP S6193670 U JPS6193670 U JP S6193670U JP 17874384 U JP17874384 U JP 17874384U JP 17874384 U JP17874384 U JP 17874384U JP S6193670 U JPS6193670 U JP S6193670U
- Authority
- JP
- Japan
- Prior art keywords
- seal
- pressurized fluid
- heater
- side member
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 3
- 230000020169 heat generation Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
Landscapes
- Mechanical Sealing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17874384U JPS6323654Y2 (en]) | 1984-11-27 | 1984-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17874384U JPS6323654Y2 (en]) | 1984-11-27 | 1984-11-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6193670U true JPS6193670U (en]) | 1986-06-17 |
| JPS6323654Y2 JPS6323654Y2 (en]) | 1988-06-29 |
Family
ID=30736309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17874384U Expired JPS6323654Y2 (en]) | 1984-11-27 | 1984-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6323654Y2 (en]) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7238558B2 (en) | 1993-06-30 | 2007-07-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of fabricating the same |
| JP2011231880A (ja) * | 2010-04-28 | 2011-11-17 | Mitsubishi Heavy Ind Ltd | ドライガスシール構造 |
| JP2019521277A (ja) * | 2016-06-30 | 2019-07-25 | ゼネラル・エレクトリック・カンパニイ | ターボ機械および対応する面シールアセンブリの組立方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6823559B2 (ja) * | 2017-07-07 | 2021-02-03 | 日本ピラー工業株式会社 | 軸封装置 |
-
1984
- 1984-11-27 JP JP17874384U patent/JPS6323654Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7238558B2 (en) | 1993-06-30 | 2007-07-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of fabricating the same |
| JP2011231880A (ja) * | 2010-04-28 | 2011-11-17 | Mitsubishi Heavy Ind Ltd | ドライガスシール構造 |
| JP2019521277A (ja) * | 2016-06-30 | 2019-07-25 | ゼネラル・エレクトリック・カンパニイ | ターボ機械および対応する面シールアセンブリの組立方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6323654Y2 (en]) | 1988-06-29 |